Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9518884 | Micro-electro-mechanical device and method for making the same | — | 2016-12-13 |
| 9302901 | Micro-electro-mechanical system device with enhanced structural strength | Chih-Ming Sun, Hsin-Hui Hsu, WeiChung Wang | 2016-04-05 |
| 9290374 | Micro-electro-mechanical system device having differential capacitors of corresponding sizes | — | 2016-03-22 |
| 9244093 | Micro-electro-mechanical sensing device and manufacturing method thereof | Chih-Ming Sun | 2016-01-26 |