Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9530929 | Lift-off method | Tasuku Koyanagi, Shin Tabata | 2016-12-27 |
| 9517962 | Plate-shaped object processing method | Noboru Takeda, Xiaoming Qiu, Fumiteru Tashino, Ken Togashi | 2016-12-13 |
| 9511579 | Separation apparatus | Tasuku Koyanagi, Shin Tabata | 2016-12-06 |
| 9425349 | Lift-off method | — | 2016-08-23 |
| 9349646 | Wafer processing method including a filament forming step and an etching step | Noboru Takeda | 2016-05-24 |
| 9305793 | Wafer processing method | Noboru Takeda | 2016-04-05 |
| 9289851 | Laser processing method | — | 2016-03-22 |
| 9233433 | Laser processing method and laser processing apparatus | — | 2016-01-12 |