Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9528825 | Method for calibrating a position-measuring system and position-measuring system | Alexander Huebel | 2016-12-27 |
| 9354048 | Method for measuring a lithography mask or a mask blank | — | 2016-05-31 |