Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9496162 | Method for supplying inert gas to STB in semiconductor wafer production system and semiconductor wafer production system using the same | Dong Gyu Yoo, Jae Hyun Lee, Jun Han Lee | 2016-11-15 |