Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9522826 | Apparatus for mixing vaporized precursor and gas and method therefor | Lewis A Bernstein, Dana Craig Bookbinder, Jennifer L Porter, Balram Suman, Pushkar Tandon | 2016-12-20 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9522826 | Apparatus for mixing vaporized precursor and gas and method therefor | Lewis A Bernstein, Dana Craig Bookbinder, Jennifer L Porter, Balram Suman, Pushkar Tandon | 2016-12-20 |