Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9329472 | Method for manufacturing EUV masks minimizing the impact of substrate defects | Jean-Louis Imbert | 2016-05-03 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9329472 | Method for manufacturing EUV masks minimizing the impact of substrate defects | Jean-Louis Imbert | 2016-05-03 |