Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9338869 | EUV light source apparatus | Takanobu Ishihara | 2016-05-10 |
| 9266130 | Liquid control apparatus | Masayuki Kouketsu | 2016-02-23 |
| 9243720 | Coupling apparatus for chemical fluid flow channel | Masayuki Kouketsu | 2016-01-26 |
| 9234586 | Linear actuator and vacuum control device | Masayuki Kouketsu | 2016-01-12 |
| 9234595 | Vacuum control valve and vacuum control apparatus | Masayuki Kouketsu | 2016-01-12 |