Issued Patents 2016
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9496131 | Liquid chemical for forming protecting film | Takashi Saio, Masanori Saito, Shinobu Arata, Hidehisa Nanai, Yoshinori Akamatsu | 2016-11-15 |
| 9481858 | Silicon wafer cleaning agent | Masanori Saito, Takashi Saio, Hidehisa Nanai, Yoshinori Akamatsu | 2016-11-01 |
| 9478407 | Liquid chemical for forming protecting film | Masanori Saito, Shinobu Arata, Takashi Saio, Hidehisa Nanai, Yoshinori Akamatsu | 2016-10-25 |
| 9349582 | Liquid chemical for forming water repellent protecting film, and process for cleaning wafers using the same | Takashi Saio, Masanori Saito, Shinobu Arata | 2016-05-24 |
| 9281178 | Cleaning agent for silicon wafer | Takashi Saio, Shinobu Arata, Hidehisa Nanai, Yoshinori Akamatsu, Shigeo Hamaguchi +1 more | 2016-03-08 |
| 9228120 | Liquid chemical for forming protecting film | Takashi Saio, Shinobu Arata, Masanori Saito, Atsushi Ryokawa, Shuhei Yamada +2 more | 2016-01-05 |