Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9487395 | Method of forming planar sacrificial material in a MEMS device | James F. Bobey, Mickael Renault, Joseph Damian Gordon Lacey, Thomas L. Maguire | 2016-11-08 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9487395 | Method of forming planar sacrificial material in a MEMS device | James F. Bobey, Mickael Renault, Joseph Damian Gordon Lacey, Thomas L. Maguire | 2016-11-08 |