Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9465303 | Exposure apparatus and device manufacturing method | Atsushi Takagi, Yoya Muraguchi | 2016-10-11 |
| 9229313 | Exposure apparatus and device manufacturing method | Atsushi Takagi, Yoya Muraguchi | 2016-01-05 |