Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9257921 | Lithography apparatus and method of manufacturing article | Yoshinori Makita, Hiroshi Isoyama, Ken Katsukura, Hiroshi Tanaka | 2016-02-09 |
| 9243939 | Flow volume measurement device and flow velocity measurement device | Masazumi Tanoura, Kenji Muta, Atsushi Takita, Minoru Danno, Shinichiro Asami +3 more | 2016-01-26 |