Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9511588 | Method for processing silicon substrate | Toshiyasu Sakai, Masataka Kato, Masaya Uyama, Hiroshi Higuchi, Yoshinao Ogata | 2016-12-06 |
| 9371225 | Substrate processing method | Toshiyasu Sakai | 2016-06-21 |