Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9509105 | Connector structure | Hironori Kunieda, Ryutaro Takano, Taku Akaiwa, Wataru Iwasaki, Masayoshi Kashima | 2016-11-29 |
| 9442398 | Position detector, lithography apparatus, and device manufacturing method | — | 2016-09-13 |
| 9303390 | Work machine and work management system | Atsushi Nagato, Kiyokazu Sagawa | 2016-04-05 |
| 9280050 | Exposure apparatus and method of device fabrication | — | 2016-03-08 |
| 9250541 | Exposure apparatus and device fabrication method | — | 2016-02-02 |
| 9246250 | Electrical connector | Yasuo Yoshiura | 2016-01-26 |