Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9523926 | Exposure apparatus and device manufacturing method | Atsushi Umemura | 2016-12-20 |
| 9400426 | Imprint apparatus | Zenichi Hamaya, Setsuo Yoshida, Yoshihiro Shiode | 2016-07-26 |
| 9285675 | Imprint apparatus | Zenichi Hamaya, Setsuo Yoshida, Yoshihiro Shiode | 2016-03-15 |
| 9234738 | Rotation-angle detection device | Takumi Asano, Takeshi Musha, Hiroshi Nishizawa, Takashi Okamuro | 2016-01-12 |