Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9229312 | Exposure apparatus, measurement method, stabilization method, and device fabrication method | — | 2016-01-05 |
NY
Nobuhiko Yabu
Overall (2016): #274,511 of 481,213Top 60%
1
Patents 2016