Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9280054 | Illumination optical system, exposure apparatus, and method of manufacturing device | — | 2016-03-08 |
NO
Noboru Osaka
Overall (2016): #275,029 of 481,213Top 60%
1
Patents 2016