Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9523569 | Positioning apparatus, lithography apparatus, and article manufacturing method | — | 2016-12-20 |
| 9297973 | Optical coupling device | Taihei Yamaguchi | 2016-03-29 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9523569 | Positioning apparatus, lithography apparatus, and article manufacturing method | — | 2016-12-20 |
| 9297973 | Optical coupling device | Taihei Yamaguchi | 2016-03-29 |