Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9448495 | Resist pattern calculation method and calculation program storage medium | Ryo Nakayama, Koji Mikami, Hiroyuki Ishii | 2016-09-20 |
| 9406510 | Pattern forming method and article manufacturing method | Yuichi Gyoda | 2016-08-02 |
| 9268239 | Exposure method and storage medium | Yuichi Gyoda | 2016-02-23 |