Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9523911 | Radiation-sensitive resin composition, resist pattern-forming method, acid generator and compound | Takakazu Kimoto, Yusuke Asano | 2016-12-20 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9523911 | Radiation-sensitive resin composition, resist pattern-forming method, acid generator and compound | Takakazu Kimoto, Yusuke Asano | 2016-12-20 |