Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9280048 | Imprint apparatus and method of manufacturing article | Hiroshi Sato | 2016-03-08 |
| 9257262 | Lithography apparatus, lithography method, and method of manufacturing article | Koichi Sentoku | 2016-02-09 |