Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9352431 | Device for forming a reduced chamber space, and method for positioning multilayer bodies | Joerg Palm, Martin Fuerfanger, Jessica Hartwich | 2016-05-31 |
| 9343610 | Device and method for precipitating a layer on a substrate | Joerg Palm, Stephan Pohlner, Thomas HAPP | 2016-05-17 |
| 9236282 | Arrangement, system, and method for processing multilayer bodies | Joerg Palm, Martin Fuerfanger | 2016-01-12 |