Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9399817 | Magnetron source, magnetron sputtering apparatus and magnetron sputtering method | Yangchao Li, Bo Geng, Guoqing Qiu, Xu Liu | 2016-07-26 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9399817 | Magnetron source, magnetron sputtering apparatus and magnetron sputtering method | Yangchao Li, Bo Geng, Guoqing Qiu, Xu Liu | 2016-07-26 |