Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9281227 | Multi-resistivity Johnsen-Rahbek electrostatic clamp | Ashwin M. Purohit | 2016-03-08 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9281227 | Multi-resistivity Johnsen-Rahbek electrostatic clamp | Ashwin M. Purohit | 2016-03-08 |