SS

Shu Satoh

AT Axcelis Technologies: 1 patents #2 of 19Top 15%
📍 Byfield, MA: #2 of 4 inventorsTop 50%
🗺 Massachusetts: #4,305 of 12,163 inventorsTop 40%
Overall (2016): #228,163 of 481,213Top 50%
1
Patents 2016

Issued Patents 2016

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
9490185 Implant-induced damage control in ion implantation Ronald N. Reece, Serguei Kondratenko, Andy Ray 2016-11-08