Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9470592 | Micromechanical structure having a deformable membrane and a protection against strong deformations | — | 2016-10-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9470592 | Micromechanical structure having a deformable membrane and a protection against strong deformations | — | 2016-10-18 |