Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9518936 | Method and apparatus for determining lithographic quality of a structure | Henricus Johannes Lambertus Megens, Jouke Krist, Miguel GARCIA GRANDA, Lu Xu | 2016-12-13 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9518936 | Method and apparatus for determining lithographic quality of a structure | Henricus Johannes Lambertus Megens, Jouke Krist, Miguel GARCIA GRANDA, Lu Xu | 2016-12-13 |