Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9238243 | System and method to adaptively pre-compensate for target material push-out to optimize extreme ultraviolet light production | Matthew R. Graham, Charles E. Kinney, Wayne J. Dunstan | 2016-01-19 |