Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9494874 | Method and apparatus for design of a metrology target | Guangqing Chen, Shufeng Bai | 2016-11-15 |
| 9355200 | Method and apparatus for design of a metrology target | Guangqing Chen, Eric Kent, Omer Abubaker Omer Adam | 2016-05-31 |