Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9390206 | Methods and systems for lithography process window simulation | Jun Ye, Yu Cao | 2016-07-12 |
| 9378309 | Pattern-independent and hybrid matching/tuning including light manipulation by projection optics | Yu Cao, Jun Ye | 2016-06-28 |
| 9360766 | Method and system for lithography process-window-maximixing optical proximity correction | Jun Ye, Yu Cao | 2016-06-07 |