Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9507279 | Method of operating a lithographic apparatus, device manufacturing method and associated data processing apparatus and computer program product | Emil Peter Schmitt-Weaver, Paul Frank Luehrmann, Daan Maurits Slotboom, Jean-Philippe Xavier Van Damme, Wolfgang Henke +2 more | 2016-11-29 |