Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9513566 | Lithographic apparatus | Kursat Bal, Bernardus Antonius Johannes Luttikhuis, Arnold Jan Van Putten, Han-Kwang Nienhuys, Maikel Bernardus Theodorus Leenders | 2016-12-06 |
| 9366973 | Lithographic apparatus and device manufacturing method | Noud Jan Gilissen | 2016-06-14 |