Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9507270 | Vacuum system for immersion photolithography | Paul John Shechter, Paul Alan Stockman | 2016-11-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9507270 | Vacuum system for immersion photolithography | Paul John Shechter, Paul Alan Stockman | 2016-11-29 |