Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9530662 | Methods for fabricating integrated circuits using directed self-assembly including a substantially periodic array of topographical features that includes etch resistant topographical features for transferability control | Tamer Coskun, Moshe E. Preil | 2016-12-27 |
| 9305800 | Methods for fabricating integrated circuits using directed self-assembly including lithographically-printable assist features | Tamer Coskun, Wei-Long Wang, Yi Zou | 2016-04-05 |
| 9305834 | Methods for fabricating integrated circuits using designs of integrated circuits adapted to directed self-assembly fabrication to form via and contact structures | Ji Xu | 2016-04-05 |
| 9286434 | Methods for fabricating integrated circuits including generating photomasks for directed self-assembly (DSA) using DSA target patterns | Yi Zou, Wei-Long Wang, Tamer Coskun | 2016-03-15 |