Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9457947 | Lithographic apparatus and device manufacturing method | Robert Gabriël Maria Lansbergen, Peter Kochersperger, David Ramirez, Xugang Xiong, George Hilary Harrold | 2016-10-04 |