Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9303312 | Film deposition apparatus with low plasma damage and low processing temperature | Kai-An Wang, Craig Marion, Michael Z. Wong, Albert Ting, Jingru Sun | 2016-04-05 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9303312 | Film deposition apparatus with low plasma damage and low processing temperature | Kai-An Wang, Craig Marion, Michael Z. Wong, Albert Ting, Jingru Sun | 2016-04-05 |