Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9370863 | Anti-slip end-effector for transporting workpiece | Naoto Tsuji | 2016-06-21 |
| 9312155 | High-throughput semiconductor-processing apparatus equipped with multiple dual-chamber modules | Yukihiro Mori | 2016-04-12 |
| D753269 | Top plate | Kazuo Sato, Naoto Tsuji | 2016-04-05 |