Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9365924 | Method for forming film by plasma-assisted deposition using two-frequency combined pulsed RF power | Fumitaka Shoji, Hiroki Arai | 2016-06-14 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9365924 | Method for forming film by plasma-assisted deposition using two-frequency combined pulsed RF power | Fumitaka Shoji, Hiroki Arai | 2016-06-14 |