Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9514934 | Atomic layer deposition of antimony oxide films | Raija H. Matero, Linda Lindroos, Hessel Sprey, Jan Willem Maes, Dieter Pierreux +3 more | 2016-12-06 |
| 9478415 | Method for forming film having low resistance and shallow junction depth | Yosuke Kimura | 2016-10-25 |