Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9524974 | Alternating sidewall assisted patterning | Erika Kanezaki, Ryo Nakamura, Kotaro Jinnouchi | 2016-12-20 |
| 9401305 | Air gaps structures for damascene metal patterning | Yuji Takahashi, Takuya Futase, Yoko Furihata | 2016-07-26 |