Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9448469 | Reflective mask blank for EUV lithography, or reflective layer-coated substrate for EUV lithography, and process for its production | — | 2016-09-20 |
| 9423684 | Reflective mask blank for EUV lithography and process for its production | Kazunobu Maeshige | 2016-08-23 |