Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9333525 | Substrate spreading device for vacuum processing apparatus, vacuum processing apparatus with substrate spreading device and method for operating same | Florian RIES, Andreas Sauer | 2016-05-10 |
| 9265165 | Sealing element | Martin Szelag, Andreas Herrmann | 2016-02-16 |