Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 9403256 | Recording measurements by sensors for a carrier head | — | 2016-08-02 | $10,698,000 |
| 9384122 | High sampling rate sensor buffering in semiconductor processing systems | — | 2016-07-05 | $10,411,000 |
| 9339914 | Substrate polishing and fluid recycling system | — | 2016-05-17 | $7,135,000 |