Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9490150 | Substrate support for substrate backside contamination control | Gwo-Chuan Tzu, Yu Chang, Xiaoxiong Yuan | 2016-11-08 |
| 9478447 | Substrate support with wire mesh plasma containment | Gwo-Chuan Tzu | 2016-10-25 |