Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9478697 | Reusable substrate carrier | Sriskantharajah Thirunavukarasu, Mingwei Zhu, Karthik Elumalai, Thean Ming Tan, Yong Cao +1 more | 2016-10-25 |
| 9421666 | Printed chemical mechanical polishing pad having abrasives therein | Kasiraman Krishnan, Periya Gopalan | 2016-08-23 |