DS

Dmitry Shur

KL Kla-Tencor: 1 patents #124 of 327Top 40%
Overall (2016): #416,616 of 481,213Top 90%
1
Patents 2016

Issued Patents 2016

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
9442369 Method and apparatus for lithographic mask production Joel Seligson 2016-09-13