Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9481608 | Surface annealing of components for substrate processing chambers | Laxman Murugesh, Padma Gopalakrishnan | 2016-11-01 |
| 9227297 | Retaining ring with attachable segments | Irfanulla Khuddus Rahmathullah, Bopanna Ichettira Vansantha, Padma Gopalakrishnan, Abraham Palaty, Aswathnarayanaiah Ravi +3 more | 2016-01-05 |