Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9447500 | CVD reactor having a substrate holder resting on a gas cushion comprising a plurality of zones | Johannes Käppeler | 2016-09-20 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9447500 | CVD reactor having a substrate holder resting on a gas cushion comprising a plurality of zones | Johannes Käppeler | 2016-09-20 |