Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9375823 | Grooved CMP pads | Robert Kerprich, Karey Holland, Diane Scott | 2016-06-28 |
| 9278424 | Customized polishing pads for CMP and methods of fabrication and use thereof | Pradip K. Roy, Manish Deopura | 2016-03-08 |
| 9272388 | Polishing systems | — | 2016-03-01 |