Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8021906 | Hermetic sealing and electrical contacting of a microelectromechanical structure, and microsystem (MEMS) produced therewith | — | 2011-09-20 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8021906 | Hermetic sealing and electrical contacting of a microelectromechanical structure, and microsystem (MEMS) produced therewith | — | 2011-09-20 |