Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7989249 | Method of manufacturing a micro-electrical-mechanical system with thermally isolated active elements | Silai V. Krishnaswamy, Philip C. Smith | 2011-08-02 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7989249 | Method of manufacturing a micro-electrical-mechanical system with thermally isolated active elements | Silai V. Krishnaswamy, Philip C. Smith | 2011-08-02 |